Title:
放電表面処理装置およびこれを用いた放電表面処理方法
Document Type and Number:
Japanese Patent JP3596272
Kind Code:
B2
Inventors:
Yoshito Imai
Hidetaka Miyake
Akihiro Goto
Hidetaka Miyake
Akihiro Goto
Application Number:
JP3318298A
Publication Date:
December 02, 2004
Filing Date:
February 16, 1998
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
C23C26/00; (IPC1-7): C23C26/00
Domestic Patent References:
| JP5228787A | ||||
| JP7070761A |
Attorney, Agent or Firm:
Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka