Title:
DISCHARGE TYPE GAS PURIFICATION APPARATUS AND GAS PURIFICATION METHOD
Document Type and Number:
Japanese Patent JP2005288239
Kind Code:
A
Abstract:
To provide a discharge type gas purification apparatus and a purification method for removing fine solid or liquid particles contained in gas as impurities from gas for purifying.
This discharge type gas purification apparatus comprises in a facing state arranged electrodes 2a, 2b with different effective areas, a high frequency power source 1 generating high frequency discharge between the electrodes by applying voltage to the electrodes, and a gas circulating means for circulating gas containing fine particles between the electrodes.
More Like This:
| JP6362615 | Plasma source |
| JP5336476 | PVD film formation method |
| JP2022151511 | PLASMA GENERATION DEVICE, AND SUBSTRATE PROCESSING DEVICE USING THE SAME |
Inventors:
HAYASHI KAZUO
NODA ETSUO
YASUI SUKEYUKI
TAKAHASHI YASUHIRO
ARAKI KUNIYUKI
NODA ETSUO
YASUI SUKEYUKI
TAKAHASHI YASUHIRO
ARAKI KUNIYUKI
Application Number:
JP2004104380A
Publication Date:
October 20, 2005
Filing Date:
March 31, 2004
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H05H1/24; B01D53/38; B01J19/08; B03C3/40; B03C3/47; B03C3/60; B03C3/66; F01N3/02; H01T23/00; (IPC1-7): B01D53/38; B01J19/08; B03C3/40; B03C3/47; B03C3/60; B03C3/66; F01N3/02; H01T23/00; H05H1/24
Attorney, Agent or Firm:
Yoshiaki Inomata
Hiroko Inomata
Hiroko Inomata
Previous Patent: COOLING WATER TREATMENT DEVICE AND ITS OPERATION METHOD
Next Patent: SHELF FOR SORTING OF MAIL
Next Patent: SHELF FOR SORTING OF MAIL