DOUBLE-FACED ADHESIVE TAPE FOR FIXING POLISHING PAD

Title:

DOUBLE-FACED ADHESIVE TAPE FOR FIXING POLISHING PAD

Document Type and Number:

Japanese Patent JP2007203400

Kind Code:

A

Abstract:

To provide a double-faced adhesive tape for fixing a polishing pad, which is excellent in slurry resistance, and can firmly fix even a polishing pad having large surface asperities to a polishing surface plate.

The double-faced adhesive tape 1 for fixing the polishing pad, has a first adhesive layer 3 arranged on one surface of a substrate 2, for being fixed to the polishing pad, and a second adhesive layer 4 formed on the other surface of the substrate 2, for being fixed to the surface plate, and functions to fix the polishing pad to the surface plate of a polishing device. Herein, the first adhesive layer 3 is formed of a synthetic rubber-based hot-melt adhesive, and the second adhesive layer 4 is formed of a pressure-sensitive adhesive.

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Inventors:

FUKUOKA YOSHIYUKI

Application Number:

JP2006024248A

Publication Date:

August 16, 2007

Filing Date:

February 01, 2006

Export Citation:

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Assignee:

SEKISUI CHEMICAL CO LTD

International Classes:

B24B37/20; C09J7/02; C09J121/00; C09J201/00; H01L21/304

Attorney, Agent or Firm:

Katsunori Sugimoto

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