Title:
DRIVING SYSTEM AND DRIVING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD, AND VIBRATION CONTROL DEVICE AND VIBRATION CONTROL METHOD
Document Type and Number:
Japanese Patent JP2018159953
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To precisely drive and control a plate stage.SOLUTION: A feedback control system (driving system) is constructed by: a plate interferometer system (interferometer) 18 that measures an amount of control (X) related to a location of a plate stage PST (plate table PTB); a synthesis unit 52 that reproduces the amount of control (X) using model information on the plate stage PST and generates an amount of synthesized control (X) by synthesizing the measurement result (Xn) with a measurement result (X) of the interferometer 18; and a stage control device 50 that gives an amount of operation obtained by using the amount of synthesized control (X) to the plate stage PST (plate stage drive system PSD). Thereby, even when removing noise of a specific frequency, by reproducing the amount of control (X) to synthesize the measurement result (Xn), a precise drive control of the plate state PST is enabled without impairing stability of the control system.SELECTED DRAWING: Figure 3
Inventors:
SAKATA KOICHI
Application Number:
JP2018127352A
Publication Date:
October 11, 2018
Filing Date:
July 04, 2018
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; G05D3/12
Attorney, Agent or Firm:
Atsushi Tateishi