To provide a dry chamber capable of keeping only a necessary part of a work area as an area of a prescribed low dew point, and further improving a degree of freedom in work inside thereof, and superior in the replacement performance of a manufacturing line.
The drying chamber is composed of a casing 20 having an opening 20a, a dry air supply piping system 14, a dry air recovery piping system 16, an upper flap 34 for opening and closing an upper side of the opening 20a, and a lower flap 38 for opening and closing a lower side of the opening 20a, the upper flap 34 is composed of a front plate 34a and a back plate 34b disposed at a back side of the front plate 34a at an interval, and dry air d supplied to a vent layer 34c formed between the front plate 34a and the back plate 34b flows down as an air curtain from a dry air supply opening 34e formed on a lower end face.
| JP2013115065 | MINI-ENVIRONMENT TRANSPORT DEVICE |
| WO/1999/036158 | TWO-STAGE ROTARY CONCENTRATOR |
| JPS5828935 | SEALING DEVICE FOR ROTARY TYPE TOTAL HEAT EXCHANGER |
WATANABE SHINJI
Yuji Tada
Maki Ichikawa