Title:
DRYER AND DRYING TREATMENT METHOD
Document Type and Number:
Japanese Patent JP2014238194
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To efficiently remove solvent, in a short period of time, remained inside a treatment container of a dryer which dries an organic material film on a substrate.SOLUTION: A dryer 100 comprises: a treatment container 1 which can be vacuumed; a loading table 3 as a support member to support a substrate S in the treatment container 1; an ultraviolet ray emitting device 5 which emits ultraviolet rays toward an inside of the treatment container 1; and a control section 6. The ultraviolet ray emitting device 5 functions as solvent decomposition means which decomposes an organic compound included in solvent remained in the treatment container 1 into low-molecular-weight compounds after carrying the dried substrate S out of the treatment container 1.
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Inventors:
OIKAWA JUNJI
IMADA YU
TOHARA ATSUSHI
OSHIMA KIYOMI
SHIMAMURA AKINORI
HAYASHI TERUYUKI
SAITO HIROMI
OTA TSUKASA
TANABE SEIICHI
IMADA YU
TOHARA ATSUSHI
OSHIMA KIYOMI
SHIMAMURA AKINORI
HAYASHI TERUYUKI
SAITO HIROMI
OTA TSUKASA
TANABE SEIICHI
Application Number:
JP2013119646A
Publication Date:
December 18, 2014
Filing Date:
June 06, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
SEIKO EPSON CORP
SEIKO EPSON CORP
International Classes:
F26B5/04
Domestic Patent References:
| JP2007101024A | 2007-04-19 | |||
| JP2005085814A | 2005-03-31 |
Attorney, Agent or Firm:
Kazuhiro Watanabe
Katsumi Hoshimiya
城澤 Tatsuya
Katsumi Hoshimiya
城澤 Tatsuya