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Title:
ELECTRIC-FIELD-EMISSION-TYPE ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP2000057940
Kind Code:
A
Abstract:

To provide a manufacturing method for an electric-field-emission-type element that can improve vacuum degree in a flat panel display and prevent adsorption of molecules to an emitter surface.

This manufacturing method includes a process for forming a getter material 20d and a gate electrode 22a on surfaces of substrates 20a, 20b, a process for forming holes in the gate electrode and the getter material by etching, using a resist pattern as a mask, a process for leaving a side spacer 24a on the side wall of the hole in the getter material by forming a first sacrificial film on the substrate and etching back, a process for forming a second sacrificial film 26 on the substrate and forming a conductive emitter electrode 27 on it, and a process for exposing the emitter electrode by removing at least part of the second sacrificial film.


Inventors:
HATTORI ATSUO
Application Number:
JP22587898A
Publication Date:
February 25, 2000
Filing Date:
August 10, 1998
Export Citation:
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Assignee:
YAMAHA CORP
International Classes:
H01J1/304; H01J7/18; H01J9/02; H01J9/385; H01J9/39; H01J29/94; H01L29/66; (IPC1-7): H01J9/02; H01J1/304; H01L29/66
Attorney, Agent or Firm:
Keishiro Takahashi (1 person outside)