To provide an electron beam deposition system capable of preventing the breaking of a crucible even if the irradiating position of an electron beam is deviated.

The circumferential part of the recessed part 1a of a crucible 1 is provided with an electron beam detector 4 composed of high m.p. metal such as tungsten via an insulator 9. The electron beam detector 4 is grounded via a current measuring section 5. The current measuring section 5 is connected to an interlock control section 6, and the interlock control section 6 is connected to a filament current control section 3. The current I flowing through the electron beam detector 4 is measured at the current measuring section 5, and the measured value signal S1 is compared with prescribed standard value at the interlock control section. When the measured value signal S1 exceeds the prescribed standard value, the filament current control section 3 stops the energization to a filament 2 based on the control signal S2 outputted from the interlock control section 6.