ELECTRON BEAM DEVICE

Japanese Patent JP3406156

B2

PROBLEM TO BE SOLVED: To realize the electron beam device, capable of shortening the distance between an electron gun and a converging lens system.
SOLUTION: An electron beam is first deflected in the X-direction by a bar magnet which are provided for a bulkhead 23, and are composed of bar-like magnet poles 28 and 29, and of coils 30 and 31, and secondly the electron beam is deflected in the X-direction subsequently by bar magnets which are provided for a bulkhead 26, and are composed of bar-like magnetic poles 33 and 34, and of coils 35 and 36, so that it is thereby axially aligned in the X-direction. The electron beam is also similarly axially aligned in the Y-direction, namely, that the electron beam is first deflected in the Y-direction by bar magnets composed of bar-like magnetic poles and coils which are provided for a bulkhead 23 in the Y-direction, and secondly the electron beam is deflected in the Y-direction by bar magnets composed of bar-like magnetic poles and coils, which are provided for a bulkhead 26 in the Y-direction, so that the beam is thereby axially aligned in the Y-direction.

Yasushi Kokubo

JP21983296A

May 12, 2003

August 21, 1996

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JEOL Ltd.
JEOL Technics Co., Ltd.

H01J37/04; H01J37/073; H01J37/147; H01J37/15; H01J37/153; H01J37/256; (IPC1-7): H01J37/15; H01J37/04; H01J37/073; H01J37/147; H01J37/153; H01J37/256

JP547335A
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JP6289825A
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JP539237Y1

Fujishima Ijima (1 outside)

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