Title:
ELECTRON DEVICE
Document Type and Number:
Japanese Patent JP2007335977
Kind Code:
A
Abstract:
To provide an electron device that has low resistance, suppresses the occurrence of a hillock and a void, and has an electrode with a high orientation property.
The electron device has a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. In this case, at least one of the lower and upper electrodes uses aluminum as a main constituent, and is made of alloy to which at least one is added as selected from a group comprising Ni, Co, V, Ta, Mo, W, Ti, Y, and Nd.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
SANO KENYA
YANASE NAOKO
OHARA RYOICHI
YASUMOTO YASUAKI
YANASE NAOKO
OHARA RYOICHI
YASUMOTO YASUAKI
Application Number:
JP2006162552A
Publication Date:
December 27, 2007
Filing Date:
June 12, 2006
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H03H9/17; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/29
Attorney, Agent or Firm:
Masahiko Hinataji