Title:
ELECTRONIC PROBE DEVICE USING EMITTER ARRAY
Document Type and Number:
Japanese Patent JP2011238387
Kind Code:
A
Abstract:
To provide an electronic probe device using an emitter array in which the probe current can be increased while keeping the diameter of a probe.
The electronic probe device comprises: an FE emitter array 1 arranged in the shape of a ring; a lens 2 which focuses a beam of the FE emitter array 1 to a diffraction surface; an iris 3 arranged on the diffraction surface; and an optical system 5 which irradiates a sample 6 with the reduced image of the diaphragm face of the iris 3. The electronic probe device is configured to increase a probe current while keeping the probe diameter of the device.
Inventors:
KATO MAKOTO
Application Number:
JP2010106902A
Publication Date:
November 24, 2011
Filing Date:
May 07, 2010
Export Citation:
Assignee:
JEOL LTD
International Classes:
H01J37/06; H01J37/04; H01J37/063; H01J37/073; H01J37/153
Domestic Patent References:
JPH09219155A | 1997-08-19 | |||
JP2003323860A | 2003-11-14 | |||
JP2002343714A | 2002-11-29 | |||
JPH01159957A | 1989-06-22 | |||
JPS6245110A | 1987-02-27 |
Attorney, Agent or Firm:
Fujiharu Ijima
Nobushige Samejima
Nobushige Samejima
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