Title:
ELECTROSTATIC TYPE VIBRATION ACTUATOR
Document Type and Number:
Japanese Patent JP3458657
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To vibrate a vibrator with a smaller voltage.
SOLUTION: In order to vibrate a vibrator 26 of an angular velocity sensor 21 in the direction of the arrow (a), a comb-shaped vibration generating section 35 is constituted of a mobile side comb-shaped electrode 27 and a fixed side comb-shaped electrode 31 and a flat vibration generating section 36, of a mobile side flat electrode 28 and a fixed side flat electrode 32. Firstly, a clearance between the flat electrodes 28 and 32 is reduced by an initial vibration force generated from the comb-shaped vibration generating section 35. With an access between the flat electrodes 28 and 32, a larger additional vibration force is generated from the flat vibration generating section 36 to apply a large vibration force to the vibrator 26 following the initial vibration force. This enables the vibration of the vibrator 26 substantially with a smaller voltage thereby enhancing the detection sensitivity of the angular velocity sensor 21.
Inventors:
Kazufumi Moriya
Application Number:
JP15043397A
Publication Date:
October 20, 2003
Filing Date:
May 23, 1997
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01C19/56; G01C19/5755; (IPC1-7): G01C19/56; G01P9/04
Domestic Patent References:
| JP7294260A | ||||
| JP854242A |
Attorney, Agent or Firm:
Kazuhiko Hirose
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