Title:
Enclosure of the electrode to the inside of the solid medium used in relation to a fluid high-voltage insulation
Document Type and Number:
Japanese Patent JP6129164
Kind Code:
B2
Abstract:
An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
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Inventors:
Sean Kellogg
Anthony Graupella
N William Parker
Mark Wutroth
Andrew Be Wells
James B. McGin
Anthony Graupella
N William Parker
Mark Wutroth
Andrew Be Wells
James B. McGin
Application Number:
JP2014517161A
Publication Date:
May 17, 2017
Filing Date:
June 21, 2012
Export Citation:
Assignee:
F-I-I Company
International Classes:
H01J27/16; H01J37/08; H01J37/317; H05H1/46
Domestic Patent References:
| JP2001523887A | ||||
| JP5206072A | ||||
| JP2005175460A |
Foreign References:
| US20100126964 | ||||
| US20110272592 |
Attorney, Agent or Firm:
Masahiko Amagai
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