Title:
環境形成装置、環境形成ユニット及び熱処理装置
Document Type and Number:
Japanese Patent JP6873071
Kind Code:
B2
Abstract:
To provide a thermal treatment device and an environment formation device with little temperature dispersion in a treatment space, and relatively easy in maintenance.SOLUTION: A thermal treatment device 1 has one or multiple heating chambers (treatment spaces) 15 for setting a treating object, and air blow-out ports 30L, 30R opened for introducing temperature-adjusted air into the treatment spaces. The air blow-out ports 30L, 30R for introducing air into the same treatment space are provided at multiple portions, and the air blow-out ports 30L, 30R include the air blow-out ports on different wall faces 27, 28 and having different setting heights.SELECTED DRAWING: Figure 2
Inventors:
Tetsuya Saito
Kenji Kuwata
Kazuhiro Sako
Kenji Kuwata
Kazuhiro Sako
Application Number:
JP2018039684A
Publication Date:
May 19, 2021
Filing Date:
March 06, 2018
Export Citation:
Assignee:
ESPEC CORPORATION
International Classes:
F27D7/02; F24F5/00; F27B17/00; F27D5/00; F27D7/04
Domestic Patent References:
| JP2003519773A | ||||
| JP2002286372A | ||||
| JP2012097969A | ||||
| JP2010216753A | ||||
| JP11125490A | ||||
| JP2006207958A | ||||
| JP2013228145A |
Attorney, Agent or Firm:
Takashi Fujita