Title:
ETCHING DEVICE
Document Type and Number:
Japanese Patent JPS56127773
Kind Code:
A
Abstract:
PURPOSE: To form a groove at a high reproducibility by providing a finish-point detector which supplies a constant voltage or a constant current between a monitoring body and a counter electrode and detects the finish point of the etching as the moment when the monitoring body is removed by etching to cause a change in the voltage or current.
CONSTITUTION: The counter electrode 21 and the monitoring body 22 are placed in an etching solution 23, DC voltage or DC current is supplied between the electrode 21 and the body 22 and is monitored by a voltmeter V or an ammeter A. In this case, the finish point of the etching is detected as the moment when the body 22 is removed by etching to cause an abrupt change in the voltage or the current.
Inventors:
TAKAHASHI MASAAKI
MISAWA YUTAKA
YATSUNO KOUMEI
MISAWA YUTAKA
YATSUNO KOUMEI
Application Number:
JP3036580A
Publication Date:
October 06, 1981
Filing Date:
March 12, 1980
Export Citation:
Assignee:
HITACHI LTD
International Classes:
C23F4/00; C23F1/00; H01L21/306; (IPC1-7): C23F1/08; H01L21/302