Title:
EVACUATING VALVE
Document Type and Number:
Japanese Patent JP2658838
Kind Code:
B2
Abstract:
PURPOSE: To provide a low-cost slow exhausting mechanism, which is mechanically easy even while suppressing the floating of particles, when evacuating a vacuum chamber under atmospheric pressure with the aid of an evacuator.
CONSTITUTION: An evacuating valve 1 is provided at an interior with a shield plate 4; and a spring 3 through the force of which the shield plate is held. The spring 3 is fixed on a pipe port surface on the evacuator side. A gap between the shield plate 4 and the inner wall surface of the casing of the evacuating valve 1 is narrowed in a direction in which the spring is contracted and one or a plurality of through-holes are formed in the plane of the shield plate.
Inventors:
KAKIMOTO YOSHIHIRO
Application Number:
JP29325193A
Publication Date:
September 30, 1997
Filing Date:
November 24, 1993
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
F16K17/30; F16K51/02; (IPC1-7): F16K17/30; F16K51/02
Domestic Patent References:
| JPS5238645A | ||||
| JPH06213345A | ||||
| JPH036175B2 |
Attorney, Agent or Firm:
京本 直樹 （外２名）
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