Title:
EXHAUST METHOD AND PRESSURE REDUCING EQUIPMENT
Document Type and Number:
Japanese Patent JPH05234902
Kind Code:
A
Abstract:
PURPOSE: To prevent reverse diffusion of exhaust gas to a process chamber, regarding the exhaust of the process chamber where a pressure reduction process is performed.
CONSTITUTION: A gas sending mechanism 5 having an aspirator structure wherein drive fluid is gas is installed on an exhaust piping 3 which connects an exhaust pump 4 to a process chamber 1. Hence reverse diffusion to the process chamber 1 is prevented. The gas sending mechanism 5 is arranged in the vicinity of the process chamber 1 of the exhaust piping 3. In the gas sending mechanism 5, 5a shows a throttle, 5b shows a gas jetting nozzle, and 6 shows a bypass piping.
Inventors:
MIFUNE AKITO
Application Number:
JP3241692A
Publication Date:
September 10, 1993
Filing Date:
February 20, 1992
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C23C16/52; C30B25/14; H01L21/205; (IPC1-7): H01L21/205; C23C16/52; C30B25/14
Attorney, Agent or Firm:
Teiichi