Title:
EXPOSING DEVICE
Document Type and Number:
Japanese Patent JP2006003611
Kind Code:
A
Abstract:
To provide a stage member having high resistant force and high resonant frequency to torsion vibration in an exposing device suitable for liquid crystal panel manufacture and the stage member used for the exposing device.
The stage member and the exposing device including the stage member which are provided with a rectangular column-like gap part and have a honeycomb structure arranged so as to make a wall constituting the gap part vertical to a direction of torsion deformation are obtained. The honeycomb structure of the stage member is desirably composed of ceramic.
Inventors:
OMI TADAHIRO
TAKEHISA KIWAMU
MORIYAMA SHIRO
SASAKI SHUNICHI
HIROSE MASATAKA
ISHII MAMORU
SUGAYA TOMOYUKI
KATAOKA MASAKO
UMETSU MOTOHIRO
TAKEHISA KIWAMU
MORIYAMA SHIRO
SASAKI SHUNICHI
HIROSE MASATAKA
ISHII MAMORU
SUGAYA TOMOYUKI
KATAOKA MASAKO
UMETSU MOTOHIRO
Application Number:
JP2004179637A
Publication Date:
January 05, 2006
Filing Date:
June 17, 2004
Export Citation:
Assignee:
UNIV TOHOKU
NIHON CERATEC CO LTD
TAIHEIYO CEMENT CORP
NIHON CERATEC CO LTD
TAIHEIYO CEMENT CORP
International Classes:
G03F7/20; H01L21/027; H01L21/68
Domestic Patent References:
| JP2005203537A | 2005-07-28 | |||
| JP2005045184A | 2005-02-17 | |||
| JP2003249542A | 2003-09-05 | |||
| JPH1179830A | 1999-03-23 | |||
| JP2001685536A | ||||
| JP2004512677A | 2004-04-22 | |||
| JP2004026371A | 2004-01-29 | |||
| JP2005234338A | 2005-09-02 | |||
| JP2003535807A | 2003-12-02 | |||
| JPH11317440A | 1999-11-16 |
Attorney, Agent or Firm:
Kenho Ikeda