Title:
EXPOSURE DEVICE FOR OPTICAL DISK MASTER DISKS
Document Type and Number:
Japanese Patent JP2003168249
Kind Code:
A
Abstract:
To provide an exposure device for an optical disk master disk which can carry out stable and efficient exposure to a high-density optical disk master disk by using an electron beam.
In the exposure device using the electron beam as a source of the exposure and having a vacuum chamber 11 in which a driving unit is installed for rotating and transferring a resist plate 13, the driving unit is moved by a friction drive means consisting of a rotary shaft 21 and a pressurization roller 24 which are in contact with each other.
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Inventors:
MIZUTA OSAMU
FUJITA SHIGERU
KUDO YUZURU
FUJITA SHIGERU
KUDO YUZURU
Application Number:
JP2002117593A
Publication Date:
June 13, 2003
Filing Date:
April 19, 2002
Export Citation:
Assignee:
RICOH KK
International Classes:
F16F15/32; F16C13/00; F16H13/04; G11B7/26; (IPC1-7): G11B7/26; F16C13/00; F16F15/32; F16H13/04