Title:
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND PRODUCTION METHOD OF ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2023142410
Kind Code:
A
Abstract:
To provide an extreme ultraviolet light generation device.SOLUTION: An extreme ultraviolet light generation device comprises: a chamber including a plasma generation region 25; a target supply part for supplying a target to the plasma generation region; a laser light condensation mirror for condensing pulse laser light to the plasma generation region; and an EUV condensation mirror 23 having a reflection plane for reflecting the EUV light radiated from the plasma generation region. The EUV condensation mirror is arranged so that the reflection plane falls within an angle range where ion energy is less than an average value of a spatial distribution of the ion energy at a position separated by a prescribed distance, from the plasma generation region of ions diffusing from the plasma generation region.SELECTED DRAWING: Figure 3
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Inventors:
HONDA YOSHIYUKI
Application Number:
JP2022049319A
Publication Date:
October 05, 2023
Filing Date:
March 25, 2022
Export Citation:
Assignee:
GIGAPHOTON INC
International Classes:
G03F7/20; H05G2/00
Attorney, Agent or Firm:
Hosaka Enju