To provide a PVDF thin film which includes small dielectric loss, high reliability, and uniform surface roughness.
A method of producing a poly(vinylidene fluoride) ("PVDF") film on a substrate from a precursor solution includes: preparing the precursor solution for the PVDF film; dissolving an additive in the precursor solution, the additive being selected from the group consisting of a hydrate salt and a hygroscopic chemical; and adding the PVDF to the precursor solution to prepare a PVDF solution. The PVDF solution is coated on the substrate to form an as-deposited PVDF film, which is dried and crystallized at an elevated temperature. The dried and crystallized as-deposited PVDF film is annealed at a further elevated temperature. The further elevated temperature is greater than the elevated temperature (but less than a melting point of the as-deposited PVDF film). The additive dehydrates at the further elevated temperature.
CHEN SHUTING
TAY FRANCIS ENG HOCK
NAT UNIV SINGAPORE
| JPH02222439A | 1990-09-05 |
| WO2006010491A1 | 2006-02-02 |
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Naomi Yoshida
Ayako Nakamura
Masayuki Okamoto
Fukagawa Eri
Satoshi Morimoto