Title:
強磁性積層膜および強磁性積層膜の製造方法ならびに電磁誘導性電子部品
Document Type and Number:
Japanese Patent JP7133392
Kind Code:
B2
Abstract:
To provide a ferromagnetic thin film or the like capable of enhancing an effect such as a high magnetic permeability or the like, achieved by a ferromagnetic thin film having a nano granular structure.SOLUTION: A ferromagnetic laminated film includes a structure in which a plurality of ferromagnetic layers 11 and 12 and an insulation layer 21 are laminated so that the insulation layer 21 is nipped between the ferromagnetic layers 11 and 12 which are opposite. Each of the ferromagnetic layers 11 and 12 has a composition expressed by a general formula: LMF, and a nano granular structure in which a magnetic particle of 1 to 20 nm in a mean diameter, expressed by L is formed by M fluorine, and which is uniformly distributed in an insulation matrix. L is one or more kind elements selected from Fe, Co, and Ni (however, a single Ni is excluded). M is one or more kind elements selected from Li, Mg, Al, Ca, Sr, Ba, Gd, and Y. F if fluoride, and satisfies the following equations: 0.03≤a≤0.07, 0.06≤b≤0.18, and 0.10≤a+b≤0.24. The insulation layer includes the composition expressed by a general formula: MF(1≤c≤2, and 1≤d≤3).SELECTED DRAWING: Figure 1
Inventors:
Masayuki Naoe
Application Number:
JP2018154102A
Publication Date:
September 08, 2022
Filing Date:
August 20, 2018
Export Citation:
Assignee:
Electromagnetic Materials Research Institute
International Classes:
H01F10/16; H01F41/18; H01L21/822; H01L27/04
Domestic Patent References:
| JP2002158486A | ||||
| JP2006351563A | ||||
| JP2003141719A | ||||
| JP2017041599A | ||||
| JP2005190538A |
Attorney, Agent or Firm:
Creation International Patent Office
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