Title:
FINE ADJUSTMENT DEVICE
Document Type and Number:
Japanese Patent JP2002001653
Kind Code:
A
Abstract:
To highly accurately adjust a supporting condition, while maintaining rigidity of a supporting part of a region for holding a workpiece, in various processing apparatuses.
A fine adjustment device 50 is provided for finely adjusting relation of the position by being interposed between a first member and a second member, which is at least composed of a lever member 51 having a fulcrum 54, a point of application 55, and a force point 56, and a bolt member 53 for transferring force to the force point 56.
Inventors:
KUWANA KAZUTAKA
Application Number:
JP2000184703A
Publication Date:
January 08, 2002
Filing Date:
June 20, 2000
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B7/22; B24B41/06; H01L21/304; (IPC1-7): B24B41/06; B24B7/22
Attorney, Agent or Firm:
Isao Sasaki (1 person outside)
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