To solve such a problem in the conventional fine flow channel element that a groove is filled, if thermal fusion is used in the adhesion of a pair of quartz glasses during formation and the degree of risk of hydrofluoric acid is high, when quertz glass substrates are bonded under pressure in such a state that hydrofluoric acid is held between the substrates and the handling of hydrofluoric acid is trouble some.
The fine flow channel element is constituted by holding an alkali ion-containing glass layer 4 between a pair of the quartz glass substrates 2, 3 where a groove becoming a flow channel 5 is formed to at least one of the opposed surfaces of the substrates and has the transmissivity of light in a wavelength region ranging from practicable ultraviolet rays to visible light, while the glass layer 4 is allowed to function as the adhesive member between the quartz glass substrates.
KONDO SEIJI
SHINOHARA ETSUO
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