Title:
フランジ機構
Document Type and Number:
Japanese Patent JP7224244
Kind Code:
B2
Abstract:
To provide a flange mechanism configured so that suction of a foreign matter and the like into a space between a cutting blade and a flange part can be suppressed more than before.SOLUTION: A flange mechanism 1 is configured so that a first support surface 3-1 supports a cutting blade 124, with an O-ring 8 pressed at a rear surface side of a base 124-1 of the cutting blade 124 suctioned from a suction hole 3-5 and fitted to a boss part 2, and a space formed by the rear surface side of the base 124-1 of the cutting blade 124 and a second support surface 3-2 of a flange part 3 is sealed with the O-ring 8 so as to prevent intrusion of a foreign matter.SELECTED DRAWING: Figure 2
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Inventors:
Yoshitaka Yamaguchi
Application Number:
JP2019108240A
Publication Date:
February 17, 2023
Filing Date:
June 10, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B45/00; B24B55/06; H01L21/301
Domestic Patent References:
| JP201875688A | ||||
| JP201664450A | ||||
| JP2018114586A |
Foreign References:
| US4729193 |
Attorney, Agent or Firm:
Sakai International Patent Office