Title:
FLAT SURFACE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2020110901
Kind Code:
A
Abstract:
To provide a flat surface processing device which enables a grind stone to be attached to a spindle safely and easily.SOLUTION: A flat surface processing device 1 includes: a cylinder 50 which is provided at a spindle flange 26 connected to a spindle 23 and can move a piston rod 52 forward and rearward along a radial direction R of the spindle 23; and a clamp 53 which is connected to the piston rod 52 and can hold an annular grind stone wheel 21a holding a grind stone 21 with an opening 54 which is formed so as to open gradually along a travel direction of the piston rod 52. When the clamp 53 moves in the travel direction, a support surface 54a of the clamp 53 pushes up an inclined surface 21b formed on a lower surface of the grind stone wheel 21a and holds the grind stone wheel 21a with the support surface 54a and a flat surface 54c.SELECTED DRAWING: Figure 7
Inventors:
MAEDA YUKI
ADACHI TEI
ADACHI TEI
Application Number:
JP2019005594A
Publication Date:
July 27, 2020
Filing Date:
January 16, 2019
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B7/04; B24B45/00; B24B41/047; H01L21/304
Attorney, Agent or Firm:
Takamitsu Shimizu