Title:
FLUIDIC GAS METER
Document Type and Number:
Japanese Patent JP3363255
Kind Code:
B2
Abstract:
PURPOSE: To enhance accuracy in the measurement of a micro flow rate by disposing a narrow channel, a movable valve operable integrally with a diaphragm, a pressure preventive board for limiting fluctuation of pressure acting on the diaphragm, and a pressure fluctuation eliminating member on the upstream side from a fluid oscillation element.
CONSTITUTION: Gas is introduced at pressure of P1 through an inlet 13 and fed through a pressure fluctuation eliminating member 13. The flow rate is then measured at pressure of P2 by means of a fluid oscillation element 14 and fed at pressure of P3 through an outlet 15. It is introduced through a pressure introduction pipe 25 to one side of a diaphragm 22 provided, on the other side thereof, with a pressure preventive board 27 for limiting fluctuation in the pressure P1 on the inlet side. When the flow rate of gas is low, the gas pressures P1, P2 and P3 are substantially equal to each other and a movable valve 23 is set gravitationally on a valve seat 24. Consequently, the gas passes through the narrow channel 21 and reaches the inlet of the oscillation element 14. Since the quantity of gas ejecting through the narrow channel 21 scarcely vary even upon fluctuation of the inlet pressure P1, a highly accurate and stabilized measurement is realized.
Inventors:
Ikko Nukui
Makoto Okabayashi
Tadayuki Minami
Yukio Kimura
Hirokazu Kanda
Masanobu Namimoto
Hideyuki Ohike
Keiichi Tomoda
Mineyuki
Yasushi Mizukoshi
Makoto Okabayashi
Tadayuki Minami
Yukio Kimura
Hirokazu Kanda
Masanobu Namimoto
Hideyuki Ohike
Keiichi Tomoda
Mineyuki
Yasushi Mizukoshi
Application Number:
JP12158294A
Publication Date:
January 08, 2003
Filing Date:
June 02, 1994
Export Citation:
Assignee:
Tokyo Gas Co., Ltd.
OSAKA GAS CO.,LTD.
Toho Gas Co., Ltd.
Aichi Clock Electric Co., Ltd.
Kansai Gas Meter Co., Ltd.
Kinmon Manufacturing Co., Ltd.
Takenaka Manufacturing Co., Ltd.
Toyo Gas Meter Co., Ltd.
OSAKA GAS CO.,LTD.
Toho Gas Co., Ltd.
Aichi Clock Electric Co., Ltd.
Kansai Gas Meter Co., Ltd.
Kinmon Manufacturing Co., Ltd.
Takenaka Manufacturing Co., Ltd.
Toyo Gas Meter Co., Ltd.
International Classes:
G01F1/20; F16K31/126; G01F3/22; G01F15/04; (IPC1-7): G01F1/20; F16K31/126; G01F3/22; G01F15/04
Domestic Patent References:
| JP545190A | ||||
| JP7324956A | ||||
| JP6196060U |
Other References:
【文献】特許3342572(JP,B2)
【文献】特許3315005(JP,B2)
【文献】特許3315005(JP,B2)
Attorney, Agent or Firm:
Keiichiro Saikyo
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