Title:
FLUORECENT X-RAY INSTRUMENT FOR MEASURING FILM THICKNESS CAPABLE OF CONTINUOUSLY PREPARING MULTIPLE CALIBRATION CURVES
Document Type and Number:
Japanese Patent JP3229004
Kind Code:
B2
Abstract:
PURPOSE: To easily perform continuous measurement on a plurality of standard samples contained in a plurality of calibration curves by dividing a calibration curve preparing process into a pre-processing and measurement processing processes.
CONSTITUTION: A pre-processing process is completed when the input l of plating species and input 2 of the values of standard samples are performed by the number of calibration curves to be prepared. In a measurement processing process, the standard samples are selected from objects to be processed and duplicate samples are discarded by selecting 3 a plurality of calibration curves and putting the standard samples in order 4 by means of a control section. Registration of measuring positions is performed following a list of standard samples displayed at the time of registering 5 the positions of the standard samples and the registered standard samples are continuously measured at the time of continuous measurement 6 of the standard samples. When occasion demands, the processes 5 and 6 are repeated. Thus, all standard samples contained in the plurality of calibration curves can be measured.
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Inventors:
Kiyoshi Hasegawa
Application Number:
JP11051492A
Publication Date:
November 12, 2001
Filing Date:
April 28, 1992
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01B15/02; G01N23/223; (IPC1-7): G01B15/02; G01N23/223
Domestic Patent References:
| JP4118509A | ||||
| JP395405A | ||||
| JP53125862A | ||||
| JP1277709A |
Attorney, Agent or Firm:
Masaaki Sakaue
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