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Patent Searching and Data


Title:
FORMATION OF COATING FILM AND COATING DEVICE
Document Type and Number:
Japanese Patent JP2000288450
Kind Code:
A
Abstract:

To provide a coating film forming method and a coating device, which are capable of uniformalizing the thickness of a coating film formed on a substrate and decreasing the quantity of a coating liquid to be used to the utmost.

The coating film is formed by discharging the coating liquid on the surface of the substrate from a coating liquid feed nozzle 80 while moving the coating liquid feed nozzle 80 above the substrate. In such a case, one or more of the discharge and the discharge rate of the coating liquid from the coating liquid feed nozzle 80, the movement and the moving speed of the coating liquid feed nozzle 80 and the rotation and the rotational speed of the substrate are properly controlled at the time of moving the coating liquid supply nozzle 80 above the substrate.


Inventors:
OTA YOSHIHARU
Application Number:
JP9985799A
Publication Date:
October 17, 2000
Filing Date:
April 07, 1999
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
B05D1/40; B05C5/00; B05C11/08; B05C11/10; B05D7/00; G03F7/16; H01L21/027; (IPC1-7): B05C5/00; B05C11/08; B05C11/10; B05D1/40; B05D7/00; G03F7/16; H01L21/027
Attorney, Agent or Firm:
Hiroshi Takayama