To provide a functional plastic member having a low reflecting film excellent in peel resistance and scratch resistance formed thereto.
Low reflecting films 1 and 2 are formed on both sides of a sheetlike transparent plastic material W. The water absorption of the transparent plastic material W is set to 0.02% or below and the hardness (Vickers hardness) of the low reflecting films 1 and 2 or a transparent conductive film 3 is 15 or above. Each of the low reflecting films or the transparent conductive film is obtained by generating ECR plasma on the side opposed to the plastic material W of a magnetron cathode and on the side opposed to the magnetron cathode of the plastic material W and performing sputtering in a high density low temperature plasma atmosphere.
HARAGA HISATO
TAKADA TAKASHI
DOKE TAKAHIRO
KIDO HIROKAZU