GALVANO-MIRROR DEVICE AND FIXING STRUCTURE FOR MIRROR

Japanese Patent JP3560693

B2

PURPOSE: To obtain a uniform light quantity by controlling so that the oscillating angle of a mirror at time time of a non-detection in which the detecting of an object is not needed larger than that at the time of a detection in which the detecting of the object is needed to scan a light at a fixed speed.
CONSTITUTION: A galvano driving circuit 42 controls the driving of a motor M by outputting plural kinds of driving signals in accordance with mode signals to the motor M. That is, the galvano driving circuit 42 outputs a driving signal for measurement in the depth measuring mode detecting depth information and outputs a driving signal for non-measurement in a depth non-measuring mode in which the depth information are not detected. In the driving signal for non-measurement, the amplitude is larger than that of the driving signal for measurement and also the period is longer (a frequency is lower) than that of the driving signal for measurement. The motor M reciprocatingly rotates with the oscillating angle corresponding to the amplitude of the driving signal and with the oscillating period corresponding to the period of the signal to make a laser beam L1 scan while making a mirror 12m oscillate. Consequently, the oscillating angle of the mirror 12m at the time of the depth non- measurement becomes larger than that at the time of the depth measurement and also the oscillating period of the mirror at the time of the depth non-measurement become longer than that at the time of the depth measurement.

Yoichi Okamoto
Tomoyuki Miki
Takeshi Moriwaki

JP16689995A

September 02, 2004

June 07, 1995

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Keyence Corporation

G02B7/18; G02B26/10; (IPC1-7): G02B26/10; G02B7/18

Yoshinobu Yamamura

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