Title:
多段容積式ポンプのガスバラスト装置
Document Type and Number:
Japanese Patent JP4159183
Kind Code:
B2
Abstract:
A gas ballast system for multistage vacuum pumps, e.g. for piston pumps and membrane pumps, has flow restrictions (10) to bleed gas into the connecting duct (5) between the pump stages and with another flow restriction (10') to bleed gas into the displacement chamber (8) of the first stage. The control of the gas ballast uses simple components and is simple to adjust.
Inventors:
Karl-Heinz Bernhard
Application Number:
JP17117299A
Publication Date:
October 01, 2008
Filing Date:
June 17, 1999
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04B37/16; F04D19/04; F04B25/00; F04B27/02; F04B37/14; F04B37/20; F04B45/00; F04B45/033
Domestic Patent References:
| JP63300931A | ||||
| JP5990U | ||||
| JP392586U |
Attorney, Agent or Firm:
Kazuo Shamoto
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Akio Chiba
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Akio Chiba