Title:
ガス分流供給装置及びこれを用いたガス分流供給方法
Document Type and Number:
Japanese Patent JP5881467
Kind Code:
B2
Abstract:
A gas dividing/supplying apparatus includes a pressure-type flow control system, a plurality of divided flow passages connected in parallel with each other and through which gas flowing from the pressure-type flow control system is divided and supplied to a process chamber, thermal-type mass flow sensors disposed in the divided flow passages, respectively, motor-operated valves disposed on a downstream side of the thermal-type mass flow sensors, respectively, and switching-type controllers that control opening and closing of the motor-operated valves, respectively, and, in the apparatus, the switching-type controllers perform switching between valve opening control for maintaining the motor-operated valves at a predetermined fixed valve opening degree based on a valve opening control command signal and divided flow control for regulating an opening degree of each of the motor-operated valves by feedback control based on a flow detection signal of the thermal-type mass flow sensor by a divided flow control command signal.
Inventors:
Yohei Sawada
Shinichi Ikeda
Ryosuke Toi
Koji Nishino
Shinichi Ikeda
Ryosuke Toi
Koji Nishino
Application Number:
JP2012043090A
Publication Date:
March 09, 2016
Filing Date:
February 29, 2012
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
G05D7/06; G05D11/13
Domestic Patent References:
| JP10240352A | ||||
| JP9217898A | ||||
| JP2004005308A | ||||
| JP6318116A | ||||
| JP2000305630A |
Attorney, Agent or Firm:
Takeshi Sugimoto
Yata Ryuichi
Yata Ryuichi
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