Title:
GAS FEEDER AND VACUUM GENERATOR
Document Type and Number:
Japanese Patent JP3452950
Kind Code:
B2
Abstract:
PURPOSE: To provide a gas feeder and vacuum generator capable of surely preventing the explosion due to the flow of a high-pressure gaseous material back to a VG driving nitrogen inlet line.
CONSTITUTION: When a high-pressure gaseous material is unexpectedly supplied due to the fundamental misoperation or the like, the gas flows back into an insertion hole 117 of a vacuum generator 11 from a high-pressure pipeline. Consequently, a push rod 125 is raised by the back flow of the gas and the repulsive force of a second coil spring 126, hence a slackened diaphragm 111 is returned to its original state, a passage 118 is closed, and the inflow of the gas into the passage 118 is blocked. Accordingly, explosion is never caused, even when plural kinds of explosive gases are used and only one system of nitrogen inlet is used.
More Like This:
Inventors:
Kazuo Yokogi
Application Number:
JP14506593A
Publication Date:
October 06, 2003
Filing Date:
June 16, 1993
Export Citation:
Assignee:
Japan Air Gases Co., Ltd.
International Classes:
B01J3/02; B01J4/00; H01L21/02; (IPC1-7): B01J4/00; B01J3/02; H01L21/02
Domestic Patent References:
| JP6241400A | ||||
| JP5203100A | ||||
| JP256229A | ||||
| JP5203099A |
Attorney, Agent or Firm:
Yoshiki Hasegawa