Title:
GASIFICATION DEVICE OF LIQUID MATERIAL
Document Type and Number:
Japanese Patent JP3938391
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To stably gasify a liquid material, to easily produce gas and to enhance accuracy of control of the gasified gas.
SOLUTION: A gasification device 3 heats the liquid material fed to a gasification chamber 25 of a housing 21 from a feed port 26 with a heater 12 to gasify, and discharges from a discharge port 27. A sintered body 28 is provided in the gasification chamber 25. The sintered body 28 is formed by compacting a powdery assembly having heat conductivity and anticorrosion property in a state having a specified porosity, and sintering. The gasification device 3 is provided with a control valve 11 for controlling a flow rate of the liquid material fed to the gasification chamber 25. The control valve 11 is provided with a valve body 44 and a seat 51, and the seat 51 has a feed port 26 in the center of it. One portion of the sintered body 28 is arranged in an adjacentnt relation to a feed port 26. A heater 12 provided on the outer periphery of the housing 21 works to heat the sintered body 28.
Inventors:
Yoshihisa Sudo
Minoru Ito
Katsuya Okumura
Yoshitaka Tsunashima
Minoru Ito
Katsuya Okumura
Yoshitaka Tsunashima
Application Number:
JP14615397A
Publication Date:
June 27, 2007
Filing Date:
June 04, 1997
Export Citation:
Assignee:
CKD Corporation
Toshiba Corporation
Toshiba Corporation
International Classes:
B01J7/00; C23C16/44; C23C16/448; H01L21/205; H01L21/31; (IPC1-7): B01J7/00; C23C16/44; H01L21/205; H01L21/31
Domestic Patent References:
| JP3017271A | ||||
| JP5228361A | ||||
| JP7047201A | ||||
| JP10085581A |
Attorney, Agent or Firm:
Takashi Tomizawa
Ikuo Yamanaka
Akika Okado
Ikuo Yamanaka
Akika Okado