Title:
ヘッド作動制御装置及び制御方法及びステージ装置
Document Type and Number:
Japanese Patent JP4291313
Kind Code:
B2
Inventors:
Yasuo Minami
Application Number:
JP2005265785A
Publication Date:
July 08, 2009
Filing Date:
September 13, 2005
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
G05B19/404; B23K37/04; B23Q15/013; B23Q16/02; G01B11/26; G03F7/20
Domestic Patent References:
| JP2005283896A | ||||
| JP2004233718A | ||||
| JP4038813A | ||||
| JP5299323A | ||||
| JP8055787A | ||||
| JP6163359A |
Attorney, Agent or Firm:
Tadahiko Ito