Title:
熱処理装置及び熱処理方法
Document Type and Number:
Japanese Patent JP4218360
Kind Code:
B2
Abstract:
A processing device, comprising a processing container, a shower head structure provided at the ceiling part of the processing container and having a plurality of gas jetting holes for jetting specified processing gas into the processing container formed in the gas jetting surface thereof facing the inside of the processing container, and a placing stand disposed in the processing container so as to face the shower head structure, wherein a head distance between the gas jetting surface and the placing stand and the blowing speed of gas from the gas jetting holes are set within the range surrounded by connecting, in a square shape with straight lines in a plane coordinate system having the head distance plotted on an abscissa and the gas jetting speed plotted on a coordinate, a point where the blowing speed of the gas from the gas jetting holes at the head distance of 15 mm is 32 m/sec, a point where the blowing speed of the gas from the gas jetting holes at the head distance of 15 mm is 67 m/sec, a point where the blowing speed of the gas from the gas jetting holes at the head distance of 77 mm is 40 m/sec, and a point where the blowing speed of the gas from the gas jetting holes at the head distance of 77 mm is 113 m/sec.
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Inventors:
Akinori Kakimoto
Kentaro Oshita
Matsuhiko Masahiko
Kentaro Oshita
Matsuhiko Masahiko
Application Number:
JP2003028876A
Publication Date:
February 04, 2009
Filing Date:
February 05, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; C23C16/455; H01L21/00; H01L21/205; H01L21/316; C23C16/44
Domestic Patent References:
| JP7007001A | ||||
| JP9017778A | ||||
| JP2001185544A | ||||
| JP2000087244A | ||||
| JP63018617A |
Attorney, Agent or Firm:
Akihiro Asai