Title:
熱処理装置及び温度制御方法
Document Type and Number:
Japanese Patent JP6804309
Kind Code:
B2
Abstract:
Disclosed is a heat treatment apparatus including: a processing container configured to accommodate a substrate; a furnace body having a heater configured to heat the substrate accommodated in the processing container and provided around the processing container; a blower configured to supply a coolant to a space between the processing container and the furnace body; and a controller having a continuous operation mode in which the blower is continuously energized and an intermittent operation mode in which energization and de-energization of the blower are repeated, and configured to control driving of the blower based on an instruction voltage. The controller drives the blower in the intermittent operation mode when the instruction voltage is higher than 0 V and lower than a predetermined threshold voltage.
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Inventors:
Tatsuya Yamaguchi
Kazuki Ohara
Kikuchi Yasuaki
Koji Yoshii
Kazuki Ohara
Kikuchi Yasuaki
Koji Yoshii
Application Number:
JP2017003548A
Publication Date:
December 23, 2020
Filing Date:
January 12, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/31; F27B5/18; F27D9/00; F27D19/00; H01L21/22
Domestic Patent References:
| JP63121429U | ||||
| JP9175143A | ||||
| JP2012080081A | ||||
| JP2012080080A | ||||
| JP2005188869A | ||||
| JP2003031510A | ||||
| JP3001066A | ||||
| JP58033083A | ||||
| JP7326592A | ||||
| JP2002299269A | ||||
| JP2011211163A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito