Title:
熱処理装置
Document Type and Number:
Japanese Patent JP3610638
Kind Code:
B2
Inventors:
Toshio Inaga
Kazushige Nada
Kazushige Nada
Application Number:
JP21372495A
Publication Date:
January 19, 2005
Filing Date:
August 22, 1995
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F26B17/22; B01J2/14; F26B23/08; (IPC1-7): F26B17/22; B01J2/14; F26B23/08
Domestic Patent References:
| JP61011103A | ||||
| JP54125566A |