Title:
HEAT TREATMENT FURNACE AND HEAT TREATMENT METHOD
Document Type and Number:
Japanese Patent JP2015065411
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a heat treatment furnace capable of improving temperature uniformity in a process tube without increasing a processing cost and deteriorating quality.SOLUTION: A heat treatment furnace comprises: a heater 9 for a warming member on a tube terminal end side and a heater 11 for a warming member on a door side provided so as to surround the outer periphery of the process tube 1; a warming member 8 on the tube terminal end side which is installed between a tube terminal end 13 in the process tube 1 and a substrate installation board 5, absorbs the heat generated by the heater 9 for the warming member on the tube terminal end side, and transfers the absorbed heat to a material gas 12; and a warming member 10 on the door side which is installed between a door 4 and the substrate installation board 5, absorbs the heat generated by the heater 11 for the warming member on the door side, and transfers the absorbed heat to the material gas 12. The warming member 10 on the door side has a shape in which a plurality of plate-like members are radially arranged. Each of the plurality of plate-like members is arranged along an axial direction of the process tube 1, and the warming member 10 on the door side is installed in the process tube 1.
Inventors:
NISHIMURA KUNIHIKO
OTA NARUTO
OTA NARUTO
Application Number:
JP2014145346A
Publication Date:
April 09, 2015
Filing Date:
July 15, 2014
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/22; F27B5/04; F27B5/14; H01L21/324
Attorney, Agent or Firm:
Hiroaki Sakai