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Title:
HEATER FOR DIE BONDING SEMICONDUCTOR CHIP
Document Type and Number:
Japanese Patent JPH0479339
Kind Code:
A
Abstract:

PURPOSE: To surely prevent the deterioration of adhesive strength and the deviation of the installing position of a semiconductor chip by heating a lead frame when intermittent intermediate carriage is stopped.

CONSTITUTION: When the intermittent carriage of lead frame supporting members 9 mounted on endless chains 3 and 4 is stopped, a lead frame A on which a semiconductor chip is bonded by conductive paste on the top plane is successively delivered by a delivery mechanism 17 at one edge of both the endless chains 3 and 4. The lead frame supporting members A heats the lead frames A since heating blocks 23, 24 and 25 are ascended and abutted on the bottom plane of the lead frames A when the carriage is stopped while being intermittently carried to the other edge of both the endless chains 3 and 4. Conductive paste is dried and hardened by repeating to heat at a plurality of heating blocks 23, 24 and 25.


Inventors:
FUJI KAZUNORI
NAGATA HIDEFUMI
NAKAMURA NOBUYUKI
Application Number:
JP19456690A
Publication Date:
March 12, 1992
Filing Date:
July 23, 1990
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
H01L21/52; (IPC1-7): H01L21/52
Attorney, Agent or Firm:
Akio Ishii (1 person outside)



 
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