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Title:
HEATER FOR MATERIAL TO BE HEATED
Document Type and Number:
Japanese Patent JPS59143609
Kind Code:
A
Abstract:

PURPOSE: To enable to make heat treatment evenly, with high precision and at high speed, by a method wherein a material to be heated, which is placed on a stage constituted rotatably and reciprocally in the right and left directions, is provided in a resonance part of a cavity and made to position on a resonance point of a microwave.

CONSTITUTION: Resin tablets 1 are mounted on rotary rollers 2, 3 and a primary rotary speed value and a laterally movement speed value are set by a drive control part 18. A primary microwave output value is set similarly on a control part 14 of a microwave output. On the one hand, a heating temperature value and a heating time value of the resin tablets 1 are set on a measuring treatment part 17 of a temperature. When a main device is operated under the above-mentioned state, the resin tablets 1 are moved laterally at a predetermined speed while they are being revolved at the predetermined number of revolutions and heated by a microwave output at a resonance point of a cavity wherein field strength reaches a maximum.


Inventors:
AMADA HARUO
Application Number:
JP1734583A
Publication Date:
August 17, 1984
Filing Date:
February 07, 1983
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L21/56; B29B9/00; B29B13/00; B29B13/02; B29B13/08; (IPC1-7): B29B3/00; H01L21/56
Attorney, Agent or Firm:
Akio Takahashi



 
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