Title:
HEATER AND SUBSTRATE TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2011138828
Kind Code:
A
Abstract:
To uniformize an in-plane temperature of an object to be heated.
The heater includes a chamber 5 having an opening 6 for carrying in and out the object W to be heated, a heater 10 arranged in the chamber and heating the object W, a holding mechanism 11 arranged in the chamber and holding the object W, and a reflector 14 reflecting heat from the heater to the object W. The reflector is arranged on an opposite side to the object with the heater interposed therebetween, and an area of the reflector in a position near the opening is enlarged as compared with other positions.
Inventors:
NISHIMURA KAZUMASA
NAGAMINE YOSHINORI
NAGAMINE YOSHINORI
Application Number:
JP2009296351A
Publication Date:
July 14, 2011
Filing Date:
December 25, 2009
Export Citation:
Assignee:
CANON ANELVA CORP
International Classes:
H01L21/31; C23C14/56; C23C16/46
Domestic Patent References:
| JP2008041698A | 2008-02-21 | |||
| JP2007149774A | 2007-06-14 | |||
| JPH07335571A | 1995-12-22 | |||
| JP2002124479A | 2002-04-26 | |||
| JP2003013215A | 2003-01-15 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu