Title:
HEATING DEVICE, HEATING/PRESSURE DEVICE AND SUBSTRATE BONDING DEVICE
Document Type and Number:
Japanese Patent JP2015008203
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To extend the life span of a heating device.SOLUTION: A heating device comprises: a heating member having a first surface which touches a heated object; and a heat generation part in which a power feeding part is fixed to a second surface of the heating member different from the first surface in an aspect away from the heating member, for generating heat when electric power is supplied to the power feeding part to heat the heating member. In the above-described heating device, the second surface may be a surface located on the side opposite to the first surface. Further, the above-described heating device includes a heat generation-side heat conduction surface firmly attached to the heat generation part and a heating-side heat conduction surface firmly attached to the second surface of the heating member, and may further include a fixing member for fixing the heat generation part to the second surface.
Inventors:
IZUMI SHIGETO
NISHIGAMI KOICHIRO
NISHIGAMI KOICHIRO
Application Number:
JP2013132596A
Publication Date:
January 15, 2015
Filing Date:
June 25, 2013
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/02; B23K20/00; H01L21/683; H05B3/74
Attorney, Agent or Firm:
Ryuka international patent business corporation
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