PURPOSE: To realize an accurate hermetic sealing test for a device sealed hermet ically with a glass based ceramic by employing a gross leak test process, a hot air blowing degassing process and a trace leak test process.
CONSTITUTION: A glass ceramic board is subjected to heating for about 30min in helium gas and sealed hermetically to produce a hermetically sealed device. A gross leak test is conducted using a leak detector. Since a gross leaked device can be determined prior to next process, i.e., trace leak test process, efficiency is enhanced in the hermetic test. A hot air circulation heating system is employed as a degassing system based on the experimental results. Since the degassing system is provided with a plurality of device set cages 7 and the time interval for throwing the cage 7 into a heating furnace 9 can be set arbitrarily, the inventive method can be applied to a case where a plurality of hermetically sealed devices having different helium gas occlusion are generated. Finally, a trace leak test process is conducted using the leak detector.
| JP2004528189 | Tool carriage that can be moved in the pipe |
| WO/2018/136444 | IMPROVED APPARATUS FOR HYDROSTATIC TESTING |
MIURA SHINYA
KANDA KOZO
