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Patent Searching and Data


Title:
HIGH ADHESION CARBON FILM FORMING MATERIAL AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP2000087218
Kind Code:
A
Abstract:

To provide a hard film forming material remarkably improved in an endurance life as a sliding member or the like by forming a DLC film having high hardness and a low friction coefficient on the surface of a base material composed of metal or ceramic with tight adhesion by a relatively simple apparatus and a process.

On the surface of a base material composed of metal or ceramic, an amorphous carbon film is formed by a cathode discharge type arc ion plating method using a carbon target and moreover, on the boundary between the carbon film and the base material, a mixed layer of 10 to 500 thickness composed of the base material constituting elements and film constituting elements is formed to obtain a high adhesion amorphous carbon film forming material.


Inventors:
YAMAMOTO KENJI
SATO TOSHIKI
Application Number:
JP25729898A
Publication Date:
March 28, 2000
Filing Date:
September 10, 1998
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
C23C14/06; C23C14/32; (IPC1-7): C23C14/06; C23C14/32
Attorney, Agent or Firm:
Etsushi Kotani (1 person outside)