Title:
熱間等方圧加圧装置
Document Type and Number:
Japanese Patent JP5931014
Kind Code:
B2
Abstract:
Provided is a hot isostatic pressing device (HIP) (1) that enables prompt cooling in a processing chamber. The HIP device (1) is provided with the following: gas impermeable casings (3, 4); a heating unit (7); a high-pressure container (2); a heat accumulator (43) provided below a processing chamber; and a cooling promotion flow path (44). The casings (3, 4) are disposed so as to form the following: a first circulation flow (41) in which a pressure medium gas passes through an inner flow path (22) and an outer flow path (12) and then returns to the inner flow path (22); and a second circulation flow (42) in which the pressure medium gas which has branched off from the first circulation flow (41) performs heat exchange with an object-of-processing (W) in the processing chamber and then is fed back to the first circulation flow (41). In the cooling promotion flow path (44), the pressure medium gas that is in the second circulation flow (42) and that has performed heat exchange with the object-of-processing (W) is guided to the heat accumulator (43) and cooled by the heat accumulator (43) before the pressure medium gas merges with the first circulation flow (41).
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Inventors:
Tomomitsu Nakai
Katsumitsu Watanabe
Yoneda
Katsumitsu Watanabe
Yoneda
Application Number:
JP2013146496A
Publication Date:
June 08, 2016
Filing Date:
July 12, 2013
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
F27B17/00; F27D7/04
Domestic Patent References:
| JP2011508671A | ||||
| JP2011127886A |
Attorney, Agent or Firm:
Toshio Yasuda
Mikio Yasuda
Mikio Yasuda