Title:
How to image feature areas using a scanning probe microscope
Document Type and Number:
Japanese Patent JP6309697
Kind Code:
B2
Abstract:
Using a local-potential-driving probe drives a conductor to a known potential while adjacent lines are grounded through the sample body reduces electrostatic scanning microscope signal from adjacent lines, allows imaging of metal lines deeper in the sample. Providing different potentials locally on different conductive lines using multiple local-potential-driving probes allows different conductors to be highlighted in the same image, for example, by changing the phase of the signal being applied to the different local-potential-driving probes.
Inventors:
Andrew Norman Ericsson
Stefan Bradley Hippolyte
Sean Zumwalt
Stefan Bradley Hippolyte
Sean Zumwalt
Application Number:
JP2017541008A
Publication Date:
April 11, 2018
Filing Date:
February 03, 2016
Export Citation:
Assignee:
FIA FFA Inc.
International Classes:
G01Q60/32
Domestic Patent References:
| JP8088258A | ||||
| JP2001174491A | ||||
| JP2001351957A | ||||
| JP2012143196A | ||||
| JP8160109A | ||||
| JP2012514190A | ||||
| JP2002277379A | ||||
| JP2008277573A |
Foreign References:
| US6185991 |
Attorney, Agent or Firm:
Masahiko Amagai