Title:
搬送装置の停止検知方法
Document Type and Number:
Japanese Patent JP5188503
Kind Code:
B2
Abstract:
There is provided a method of detecting a stop of a transport apparatus which can quickly and easily detect and improve the throughput and the ratio of utilization without incurring an increase the number of parts. The apparatus is used which is provided with a drive motor and a transport arm one side of which is mounted on a rotary shaft of the drive motor. As the drive motor there is used one in which an induced electromotive force is generated when a force in the direction of rotation is applied to the rotary shaft. Then, an article S to be transported is held on the other side of the transport arm. When the drive motor is operated to drive the rotary shaft by a predetermined angle of rotation and then stopped, the above-described induced electromotive force to be generated due to the vibrations of the transport arm is detected.
Inventors:
Yoshiji Fujii
Application Number:
JP2009533192A
Publication Date:
April 24, 2013
Filing Date:
September 19, 2008
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H02P3/06; H01L21/677; H02P8/34
Domestic Patent References:
| JPH08189859A | 1996-07-23 | |||
| JP2007136975A | 2007-06-07 | |||
| JP2002076095A | 2002-03-15 | |||
| JP2002292337A | 2002-10-08 | |||
| JP2006016142A | 2006-01-19 | |||
| JP2005012033A | 2005-01-13 |
Attorney, Agent or Firm:
Seiryu Corporation