Title:
How to manufacture the electron beam device with which the electron beam device, the gette sheet, and the gette sheet were provided
Document Type and Number:
Japanese Patent JP6072024
Kind Code:
B2
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JPS5474593 | CHARGED PARTICLE BEAM WORKING MACHINE |
Inventors:
Werner The Hague
Dominique croetta
Urs Hostedtler
Benno Jigger Rig
Toni Waver
Dominique croetta
Urs Hostedtler
Benno Jigger Rig
Toni Waver
Application Number:
JP2014517681A
Publication Date:
February 01, 2017
Filing Date:
June 27, 2012
Export Citation:
Assignee:
TETRA LAVAL HOLDINGS & FINANCE S.A.
International Classes:
H01J37/30; G21K5/04; H01J7/18; H01J9/39
Domestic Patent References:
JP2006179686A | ||||
JP40019302Y1 | ||||
JP2007532899A | ||||
JP2004020232A | ||||
JP2007511039A |
Foreign References:
WO2010040454A1 | ||||
US3144552 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
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